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Applet Worksheet

1. Oxide thickness with various threshold voltages. Complete the following table with threshold voltages Vt (Vgb) in each case for tox values (Qox = 1E10, nMOS, N = 1E15)

 tox [ A ] 50 100 200 300 500 1E3 2E3 5E3 1E4 M = Al . . . . . . . . . M=n+poly . . . . . . . . .

Briefly discuss  your results in view of Qox .

2. Work function difference

A.  Set the applet at M = n + poly, tox =300 A , Qox = 1E10

n-MOS and N = 1E15. Record Vgb for flat-band and threshold.

VFB = ______________            VT = ____________________

B. Set the buttons at M = p+ poly , tox =300 A , Qox = 1E10 q/cm2
n-MOS and N = 1E15 q/cm3. Record Vgb for flat-band and for threshold.

VFB = ______________              VT = ____________________

C. Compare the results in A) and B), which one has smaller (absolute value) VFB and VT.

A 'virtual laboratory' worksheet created by Prof. Jennifer Ross of Univ. of Pacific is available in pdf format. Print it out and complete the worksheet while 'playing' with the MOS capacitor applets. This is the same worksheet as the Equilibrium Band and Potential applets. (2/17/1999)