The fabrication steps of a pair of Metal-Oxide-Semiconductor (MOS) Field Effect Transistor (FET) and a Bipolar Junction Transistor (BJT) on a Silicon wafer is illustrated in this applet. The four buttons, 'first', 'previous', 'next', and 'last' let you view the static images at various points of the device fabrication. These static images are similar to the illustrations found in textbooks, web pages (see, for example, the Univ. Illinois ECE344 page), or even some applets (see the slide_show applet at this site). The 'animate_next' button shows you through the animated 'time sequence' of the fabrication flow from this step to the next step. As you can see, the animation capability teaches you most clearly the detailed physical steps involved. The fabrication steps of Semiconductor Devices involve many physical, chemical and thermal steps which this applet let you understand.
This applet was written as a term project by two graduate students:
Xinran Wang (the static and dynamic steps 1 through 8) and Ming Lu (the
static and dynamic steps 9 through 14).